Dr. Michael Kubis

Dr. Michael Kubis

System Engineer

(Şirket adı sadece kayıtlı üyeler tarafından görülebilmektedir)

  • 5504 Veldhoven
  • Hollanda

Dr. Michael Kubis adlı kişiye mesaj gönderin!

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Mesaj gönder

Kişisel Bilgilerim

İş Deneyimlerim (12 yıl, 2 ay)

  • İşyerindeki statü
    Çalışan

Eğitim Bilgilerim

  • 10/1990 - 03/2000
    TU Dresden

    Physik, Dr. rer. nat.

    Oberflächen- und Mikrostrukturphysik, Festkörper- und Werkstoffphysik

  • Diller
    Almanca (Ana dili), İngilizce (Akıcı), Rusça (Temel bilgiler)

Hakkımda

Patente:

O. Gutfleisch, M. Kubis, A. Handstein, B. Gebel, K.-H. Müller, I. R. Harris, L. Schultz
Method for producing a magnetic alloy powder
(US Patent 6352597)

B. Kochan, J. Karl, M. Kubis, N. Haase
Method for projection of a circuit pattern, which is arranged on a mask, onto a semiconductor wafer
(US Patent 7252913)

N. Birnstein, M. Kubis
Verfahren zur Beschriftung von Masken
(IPCOM # 000135139D)

T. Zell, H. Ollendorf, S. Schmidt, E. Hietschold, M. Kubis
Compensation of process-induced displacement
(Offenlegungsschriften 2008P00485 US / 2008 E 00433 DE)


Veröffentlichungen (Auswahl):

M. Kubis, L. Cao, A. Handstein, B. Gebel, K.-H. Müller, L. Schultz
Preparation of Sm2Fe17-xGaxNy/Cy magnets by a hydrogenation-disproportionation-desorption-recombination process
J. Appl. Phys. 81 (1997) 6485-6487.

M. Kubis, L. Cao, K.-H. Müller, L. Schultz
Hydrogenation disproportionation desorption recombination on Sm2Fe17-xGax with high Ga content (x  1) by means of reactive grinding
J. Phys. D: Appl. Phys. 30 (1997) L51-L54.

M. Kubis, K.-H. Müller, L. Schultz, O. Gutfleisch, I.R. Harris
Hydrogenation and disproportionation of Sm2Fe17-xGax at high hydrogen pressures
J. Appl. Phys. 83 (1998), 6905-6907.

M. Kubis, W. Rave, L. Cao, B. Gebel, K.-H. Müller, L. Schultz
Hydrogenation-disproportionation-desorption-recombination in Sm2Fe16M (M = Al, Ga and Si) and magnetic properties of their carburized powders
J. Alloys Comp. 281 (1999) 60-63.

M. Kubis, O. Gutfleisch, K.-H. Müller, I. R. Harris, L. Schultz
Microstructure and HDDR-processing of as-cast Sm10.5Fe88.5Zr1.0
J. Magn. Magn. Mater. 196-197 (1999) 297-298.

M. Kubis, O. Gutfleisch, B. Gebel, K.-H. Müller, I. R. Harris, L. Schultz
Influence of M = Al, Ga and Si on microstructure and HDDR-processing of Sm2(Fe,M)17 and magnetic properties of their nitrides and carbides
J. Alloys Comp. 283 (1999) 296-303.

M. Kubis, A. Handstein, B. Gebel, O. Gutfleisch, K.-H. Müller, and L. Schultz
Highly coercive SmCo5 magnets prepared by a modified hydrogenation-disproportionation-desorption-recombination process
J. Appl. Phys. 85 (1999) 5666-5668.

M. Kubis, D. Eckert, B. Gebel, K.-H. Müller, and L. Schultz
Intrinsic magnetic properties of Sm2Fe17-xMxNy/Cy (M = Al, Ga or Si)
J. Magn. Magn. Mater. 217 (2000) 14-18.

M. Kubis, A. Handstein, B. Gebel. O. Gutfleisch, K.-H. Müller, and L. Schultz
Thermodynamics of the (Sm2Fe17-xGax + H2)-system
J. Alloys Compd. 308 (2000) 275-279.

M. Kubis, A. Handstein, B. Gebel, O. Gutfleisch, K.-H. Müller, and L. Schultz
Hydrogen-induced amorphization of SmFe3
Mater. Sci. Forum 343-346 (2000) 557-561

K. Palitzsch, M. Kubis, U.P. Schroeder, K. Schumacher, A. Frangen
Matching OPC and masks on 300-mm lithography tools utilizing variable illumination settings
Proceedings of the SPIE, Volume 5377, pp. 872-880 (2004)

A. Frangen, R. Jakob, and M. Kubis
Mask manufacturing mix-and-match in frontend wafer processing
Proceedings of the SPIE, Volume 5567 (2), pp. 1067-1075 (2004)

R. Schiwon, A. Grandpierre, M. Kubis, U.P. Schroeder
Critical dimension control on I-line steppers
Proceedings of the SPIE, Volume 5752, pp. 765-773 (2005)

U.P. Schroeder, S. Poelders, T. Fischer, K. Schumacher, A. Kiss, A. Frangen, D. Nees, M. Kubis, G. Erley, B. Janke
The challenge of high-volume 193-nm semiconductor manufacturing
Proceedings of the SPIE, Volume 5754, pp. 177-184 (2005)

C. Berger, R. Schiwon, S. Trepte, M. Friedrich, M. Kubis, J. Horst, A. Grandpierre
Critical dimension variations of I-line processes due to swing effects
Proceedings of the SPIE, Volume 6152 (2006)

A. Grandpierre, C. Berger, U.P. Schroeder, R. Schiwon, M. Kubis
Comparison of I-line and DUV high-energy implant litho processes
Proceedings of the SPIE, Volume 6152 (2006)

A. Marchelli, K. Gutjahr, M. Kubis, C. Sparka, M. Ghinovker, A. Navarra, A. Widmann
Overlay mark optimization using the KTD signal simulation system
Proceedings of the SPIE, Volume 7272 (2009)
 

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