Dr. Elliot Smith

Oversee the development team for process integration of MEMS devices. - MEMS products at IMT include microfluidics, mirrors, lenses and filters for Lidar applications, Lab on a chip, SAW devices, RF actuators and switches, and many more. Works with the Executive team to build up and organize the team to allow for an expanded customer portfolio.

Technical Lead Engineer for the development of 3D Flash Lidar used in advanced driver-assistance systems: Responsibilities include the overall coordination of the optics, mechanics, hardware, algorithm and software teams working on the opto-electronic development of our next generation Lidar System. Patent Development Committee Member - Review board for IP implementation strategy Technology trend tracking, technology roadmap development, project management, customer communications

Systems engineering within the Front End of Line (28nm/32nm), specifically gate patterning of transistors, including developing new integration schemes. R&D of processes and integration for a new 22FDSOI technology.

I worked within the Etch department. I was in charge of the Gate Etch process which defines the gate structure of the transistor for High-K metal gate technologies, based on 300mm wafers. I oversaw and assured the quality of the process for the 32nm technology node as well as worked closely on the development of new product flavors and process development for 28nm node within the Gate and Spacer process steps using Design of Experiments.

Worked as a group leader for a small scientific group focused on the characterization of optical, metamaterial and polymeric strained structures. Prior to taking this role I worked as a Staff researcher/PhD candidate on the optical and structural properties of nano-/micro- self-assembled on-chip devices. Explored the development, characterization and sensing capabilities of novel microstructures which can be created via self-assembled pre-strained Nano thin films. I also setup and ran an micro optics lab.

My main work focused on the optics-based electromagnetic calorimeter detector for collecting the total energy and particle trajectory of bi-products from the collision of electrons and positrons at very high energies. Among many others, the job consisted of the study of scintillating tiles, fiber optics and Silicon Photomultipliers for detecting single photon emission at room temperature.

The final work focused on in my thesis was "Self-assembled rolled-up devices: towards on-chip sensor technologies" which explored the development, characterization and sensing capabilities of novel microstructures which can be created via self-assembled pre-strained Nano thin films

Physics and Optics

Minor in Mathematics