Dr. Ravinder CHUTANI

• Technology development of a vertical microscanner. • Low temperature wafers sealing for packaging of MOEMS devices. • Fabrication of a new generation of atomic resonators. • Development of multi-dielectric layer (SiO2/Si3N4) using ICPECVD • Device dynamic characterization: laser vibrometer. • Managing project and purchase of material. • Writing reports and participation in project proposal

• Technology development of MEMS based Stirling engine to harvest energy from waste heat. • Fabrication of low frequency hybrid fluidic membrane for piston free thermal machine. • Freely suspended high temperature soft polymer (RTV silicone) thin membrane. • Multiple Si/glass anodic sealing. • Wafer level fluid filling process through microchannel. • Fabrication of a Si pillar based heat regenerator. • Device dynamic characterization: laser vibrometer. Project: ANR Project MISTIC

Research: • Technology development for the Cesium (Cs) atomic resonators. • OTS polymer coating of Cs microcells as well as classical glass cells (glass blowing) in vapor phase. • Fabrication of binary gratings in glass. • Reactive ion etching of glass. • Preliminary optical characterization of gratings: optical microscope, He-Ne laser. Project: ANR Project ISIMAC

Thesis title: Design, technology and packaging of cesium vapor cells for MEMS atomic clocks. • Design and fabrication of different silicon cavity based Cs vapor cells • Silicon Deep reactive ion etching • Wet KOH etching of silicon • Fabrication of micro-optical components (diffraction gratings, QWP) in silicon nitride. • RIE of silicon nitride. • Cs activation inside sealed silicon cavities using external laser. • Preliminary optical characterization of gratings: optical microscope, He-Ne laser.

Micro nano technology, MEMS, MOEMS , Simulation