Aboubacar Chaehoi

• Design for reliability of second generation of accelerometers and pressure sensors with a complete wafer-level packaging solution (BCB and anodic bonding) for one of our industrial partner. • Development of test and characterisation strategy for these sensors. • Dissemination of R&D results at international conferences and journals. Research activities include CMOS MEMS monolithic sensors, Piezo-electric MEMS actuators an MEMS DC/DC converters. • Author and and Principal Investigator of different resea

• Support in the development and integration of a CMOS-SOI MEMS-compatible process for a major UK-based MEMS player (Semefab). • Design of a monolithically (MEMS and ASIC) integrated 3-axis piezoresistive accelerometer and a pressure sensor on this SOI process.

"Development and evaluation of an oscillation based-test method for monolithic MEMS" --> Evaluation of a test method that was originally designed for analog electronic for the test of MEMS - CADENCE simulation tools (Analog Artist, Monte Carlo simulations, AHDL language)

“Design of sensors based on Pelletier micro-modules (Thermopile with constant temperature of sensing surface and vacuum sensor)” --> Theoretical research, adevelopment of the electronic circuit and performance evaluation of a thermopile and a vacuum sensor.

“Design and Modelling of CMOS monolithic MEMS using FSBM technology: Application to inertial sensors”, • Design & characterization of a 3-axis accelerometer in CMOS-FSBM technology (AMS 0.3µm technology). Development of FEM & behavioral models