Dr. Holger Glatzel

Leading the optics engineering team of the LS-SWIFT division. Our team is responsible for all aspects of the optical design & engineering from concept to product release. Development of next-generation wafer inspection tools for the semiconductor industry.

Development of optical metrology and inspection equipment for the semiconductor industry. Lead the systems & optics engineering department (16 members). The applied core optical metrology techniques were Spectroscopic Reflectometry and Spectroscopic Ellipsometry. Our automated, stand-alone and integrated systems address numerous process control applications, including critical dimension and film thickness measurement.

Responsible for high-value (up to $15M) product development programs (incl. EUV Projection Optics Module with 0.5 NA, Etalon with 290 mm critical aperture and < 1 nm rms cavity error). Leading cross-functional program teams of up to 40 members. Leading team to development and implement a Product-Development Process across all facilities. Member of sub-division Management Team.

Responsible for high-value (up to $90M) development programs (incl. RIM, SBSS, OLI, LIGO and JWST). Supervision & Coaching of Program Managers and Project Engineers (up to 10 Direct Reports). Development of inner-divisional rules & processes. New Business Development. Member of sub-division Management Team.

Responsible for the development of Optical Modules and Systems. Managed up to 14 Direct Reports. Technical Lead. 5 patents filed (compare below). Manufacturing support. Lead a joint yield improvement project with Mfg. Budget and resource planning. Direct interface with the Product Development Programs.