Ashwini Prabhulinga

Metal etch, ASH & UVB • Recipe setup & optimization for metal etch UV bake, and ASH processes • Qualification of new tool/process/material • Development and implementation of system/process monitoring FDC strategies • Identifying and analyzing potential process/product/equipment problems • Hold lot disposition • Tools: Ashers & UVBs--> Axcelis & Trymax ; Etchers--> AMAT

• Overlay: Supporting metrology team with overlay recipe creation and recipe improvements • Performance analysis for all critical litho processes (BCD, MEMS, Power-MOS): Process/Quality control • Hold lot reporting: Evaluate top hold lot reasons and reporting to litho team • SPC-eCAPs: Optimizing CD & Overlay recipes. Importing CD and Overlay data to an SPC tool (SPACE) and defining eCAPs. Specification clannel configuration

Semiconductor Physics and nanostructures, Micro and nano devices, Materials in Micro and nano systems, Technologies of micro and nano systems, Microscopy and analysis on nano scale, Micro optics, Surface and thin films, Reliability of micro and nano systems, Smart sensor systems.

Power electronics, Logic design, signal processing, Real time systems, Optical fibre communication, Antennas and wave propogation, Microwave and radar, digital and analog electronics, CMOS VLSI design, control systems, physics.