Daniel Zschäbitz

- optimization and support of run-to-run- and FDC-controllers for lithography (ASML, NIKON), CMP (Ebara) and Thin Films (Novellus) - run-to-run team lead - development of an software interface between the fab dispatching system (RTD) and APC (Sampling, PCL, run to run) - trouble shooting, consulting and training for Litho, CMP and Thin Films - support of the Litho dose mapper application - controller software development (Tcl/Tk), test, documentation - website development (php)

- development, integration, optimization and support of run-to-run- and FDC-controllers for Litho (ASML, NIKON) and CMP (Ebara). - trouble shooting, consulting and training for Litho and CMP - controller software development (Tcl/Tk), test, documentation - website development (php)

- database development for an run-to-run controller test system - documentation - preparation of presentations for the AEC/APC conference

- development of an ISO conform integration of signature and encryption functionality for common smart cards - software test - data analysis

- optimization support of an run-to-run controlled CMP-process - data analysis - preparation of presentations for the AEC/APC conference - member of the AEC/APC conference organization team

- integration and automation of optical and electrical measurement modules (Hercules, OES) at plasma etch tools (AMAT) - data analysis

major subject: Electrical Engineering minor subject: Communications and Information Technology subject of thesis: „Decodierung von Blockcodes im Trellisdiagramm am Beispiel von Reed-Muller Codes“