Dr. Edgar Alberto Osorio Oliveros

Expert of the Optics Lifetime (OLT) Scanner Project (EUV Program). Goal of the OLT project in a nutshell: keep EUV-mirrors (made by stacking of thin films) clean and functional for the specified lifetime of the scanner. In charge of the technical program to be executed, ensuring the cohesion and interconnection of the project to others (overview). Engaged in setting up collaborations with academic partners/experts.

Lead the Optics Lifetime Scanner project within the research department (EUV program) both on organizational and content level.

Worked at the research department (EUV program) on very different challenging topics/projects addressed experimentally in our EUV lab: optics lifetime (molecular contamination and material damages), particle contamination and mitigation, and optimization of reflecting layers. Designed experimental high-vacuum setups and performed/analyzed experiments. In charge of materials characterizations (TEM, XPS, SEM, AFM).

Molecular electronics, Quantum dots, Nanoscience, Fabrication of devices with lithography

Nanotechnology, Nanostructures, Microtechnology, Optoelectronics