Mikko Pekonen

Epitaxial process engineering using V100 MBE- and Aixtron 2600 MOCVD reactors, with a focus on MBE tools. Production of high power, 8xx- and 9xx nm AlGaInP and AlGaAs edge-emitters and optically pumped VCSEL:s on GaAs. MBE process optimization, continuous yield improvement and reactor hardware customization. Lead epitaxy engineer in MBE production line transfer project: hands-on experience with installing, ramping up and qualifying the MBE reactors, related characterization equipment and SQL database.

Epitaxial process engineering using V100 MBE reactors. High power 8xx- and 9xx AlGaInP and AlGaAs edge-emitters and optically pumped VCSEL:s. Development of MBE-production monitoring tools: SPC charts and yield calculation integrated with custom made SQL database. Production line transfer project: Dismantling, decontamination and transporting MBE reactors overseas.

Design, development and testing of single lateral mode, individually addressable laser diode device: bar geometry-, process- and coating design, organization of process experiments and test results analysis. Facet passivation development, device life time testing and failure mode analysis.

Project lead: Design, specification and implementation of SQL-based database covering all aspects of Epi wafer production, documentation, characterization and wafer shipments. Engineering support and monitoring in cleaving and coating department. “Greening Engineer” of Coherent Finland – responsible that all products and related documentation is in accordance with the EU RoHS Directive (Restriction of Hazardous Substances).

Preparing M.Sc Thesis, subject: Material quality control in Molecular Beam Epitaxy-based Production. Test laser device design, process development and related processing work (ridge waveguide-, oxide stripe- and Schottky processes). Studying and evaluating different characterization methods for quality control purposes: Photo Luminescence mapping, Fourier Transform Infrared Spectroscopy, Electrochemical Capacitance Voltage profiling, Hall measurement, etc.

Processing and characterization of semiconductor laser diodes: edge emitters, VCSEL:s and resonance cavity LED:s.

Semiconductor physics (Major), Electronics (minor), Modern Electric Energy Technology (minor). Thesis: Material quality control in Molecular Beam Epitaxy-based production