Dr. Enrico Serra

Design and microfabbrication of Si-based Micro-Opto-Mechanical-System (MOMS) resonators for quantum optics experiments and on-chip optical sensing. Research is funded by the national experiment INFN-HUMOR (http://www.tifpa.infn.it/projects/humor) where I am currently the local coordinator for INFN. I am working in an international scientific collaboration for the micro-fabrication process development, its optimisation and implementation at the Else Kooi Lab, Technical University of Delft, The Netherlands.

Design and microfabrication of Si-based Micro-Opto-Mechanical-System / Micro-Electro-Mechanical-System (MOMS/MEMS) resonators for quantum optics and for the analysis of statistical properties of thermal noise. R&D in the field of MEMS-based vibrational energy harvesting devices for multi-source ultra-low power wireless application. Training on Si-processing in class 100 (CMOS) and 10000 (MEMS) of the Else Kooi Lab (TU Delft, The Netherlands) clean-room facility.