Dr. George-Felix Leu

- RF and DC sputtering, Plasma-etching, Plasma-Ashing - thin film deposition and characterization: Pt, Ni, Al2O3, SiO2, Ga2O3 - process-development, process-transfer to production - equipment evaluation, acceptance test, commissioning

- Technological supervision, monitoring and optimization of the deposition processes for the Calyxo furnaces - Technological analysis, testing and improvement of installation modifications - Development of the deposition process regarding stability, panel efficiency and installation uptime - Troubleshooting - Improvement of the statistical process control and development of new evaluation tools - Disciplinary lead of the team deposition and technical guidance of the operators

- Promotion of new technologies and innovations in the company in order to define and reach the roadmap goals - Consideration, evaluation and creation of IP (intellectual property) - Development of new plasma sources and new plasma diagnostics methods. - Concept and design of a test bench for plasma sources and diagnostics - Proposed and tested process steps towards reaching world record 12% efficiency solar panel

- Increased cleaning rate from 4 A/s to 25 A/s, demonstrated potential for further increase up to 35 A/s - Management of various innovation projects - Solved specific physics-engineering issues of a vacuum-plasma installation, both in-house and at the customer site, as for example related to gas chemistry, material aging, mechanical stability, gas-, RF- and heat- distribution

• Worked on reactor prototype development and further development/design optimization that leads to a customer compatible reactor. • Knowledge and creation of reactor relevant patents

- Performed diagnostics of plasmas polymerization processes - Investigated the negative ions in an oxygen plasmas - Designed, implemented in Matlab and tested a global plasma model - Coached bachelor and master students in plasma diagnostics, led seminars and drafted laboratory handouts for the lecture Materials and Circuits for Electrical Engineering

- Built and investigated a cesium diode for thermionic energy conversion - Performed thin film deposition by means of a metal vapor arc - Experimentally investigated nonlinear phenomena in arc plasmas

Plasma Physics, Plasma technology, Plasma Diagnostics, Plasma Modelling

Technological Physics. Optics and technologies with lasers and plasmas.